US 4,383,319 AGranted

Semiconductor laser

AssigneeMatsushita Electric Industrial Co., Ltd.

InventorsHirokazu Shimizu, Masaru Wada, Takashi Sugino, Kunio Itoh

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Abstract

In a laser comprising a GaAs substrate, an active layer of GaAlAs put between a first and a second clad layers, a buffer layer is disposed between said first clad layer and said substrate, and thermal expansion coefficient of the buffer layer is selected smaller than that of said active layer; thereby an internal stress of the active layer is released and lifetime of the laser is very much prolonged.

Claims2

Dependent claims

In a semiconductor laser the improvement comprising:

a semiconductor substrate,
a first semiconductor layer to work as an active region,
a second semiconductor layer and a third semiconductor layer to serve as clad layers disposed contacting the lower face and the upper face of said first semiconductor layer,
said first semiconductor layer having a thermal expansion coefficient equal to or smaller than that of said substrate,
said first semiconductor layer having a thermal expansion coefficient equal to or smaller than that of said substrate,
said second semiconductor layer and said third semiconductor layer having thermal expansion coefficients smaller than said first semiconductor layer,
said first semiconductor layer, said second semiconductor layer and said third semiconductor layer being epitaxial layers disposed on said semiconductor substrate and,
characterized in that
the semiconductor laser further comprises a fourth layer as a buffer layer on one of the underneath face of said second layer and the upper face of said third layer, said fourth layer having a thermal expansion coefficient smaller than that of said first semiconductor layer, and wherein said active layer is formed of a mixed crystal Ga.sub.1-x Al.sub.x As and said buffer layer is formed of a mixed crystal Ga.sub.1-u Al.sub.u As and t represents the buffer layer thickness and wherein the values x, u and t are selected in a range contained in a x-u-t three dimensional region defined by:
two parallel planes x=0.16 and x=0.24
two parallel planes u=0.4 and u=0.6 and a first upper face encircled by the following points:
a (x=0.16, t=11.4, u=0.4)
e (x=0.16, t=8.6, u=0.5)
h (x=0.24, t=12.6, u=0.5)
d (x=0.24, t=17, u=0.4)
and a second upper face encircled by the following points:
e (x=0.16, t=8.6, u=0.5)
i (x=0.16, t=6.8, u=0.6)
l (x=0.24, t=10.6, u=0.6)
h (x=0.24, t=12.6, u=0.5)
and a first lower face encircled by the following points:
b (x=0.16, t=5.0, u=0.4)
f (x=0.16, t=4.0, u=0.5)
g (x=0.24, t=7.3, u=0.5)
c (x=0.24, t=9.0, u=0.4)
and a second lower face encircled by the following points:
f (x=0.16, t=4.0, u=0.5)
j (x=0.16, t=3.3, u=0.6)
k (x=0.24, t=5.8, u=0.6)
g (x=0.24, t=7.3, u=0.5).

27 more elements

Dependencies are inferred from the claim text.

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Abstract

In a semiconductor laser the improvement comprising:

a semiconductor substrate,
a first semiconductor layer to work as an active region,
a second semiconductor layer and a third semiconductor layer to serve as clad layers disposed contacting the lower face and the upper face of said first semiconductor layer,
said first semiconductor layer having a thermal expansion coefficient equal to or smaller than that of said substrate,
said first semiconductor layer having a thermal expansion coefficient equal to or smaller than that of said substrate,
said second semiconductor layer and said third semiconductor layer having thermal expansion coefficients smaller than said first semiconductor layer,
said first semiconductor layer, said second semiconductor layer and said third semiconductor layer being epitaxial layers disposed on said semiconductor substrate and,
characterized in that
the semiconductor laser further comprises a fourth layer as a buffer layer on one of the underneath face of said second layer and the upper face of said third layer, said fourth layer having a thermal expansion coefficient smaller than that of said first semiconductor layer, and wherein said active layer is formed of a mixed crystal Ga.sub.1-x Al.sub.x As and said buffer layer is formed of a mixed crystal Ga.sub.1-u Al.sub.u As and t represents the buffer layer thickness and wherein the values x, u and t are selected in a range contained in a x-u-t three dimensional region defined by:
two parallel planes x=0.16 and x=0.24
two parallel planes u=0.4 and u=0.6 and a first upper face encircled by the following points:
a (x=0.16, t=11.4, u=0.4)
e (x=0.16, t=8.6, u=0.5)
h (x=0.24, t=12.6, u=0.5)
d (x=0.24, t=17, u=0.4)
and a second upper face encircled by the following points:
e (x=0.16, t=8.6, u=0.5)
i (x=0.16, t=6.8, u=0.6)
l (x=0.24, t=10.6, u=0.6)
h (x=0.24, t=12.6, u=0.5)
and a first lower face encircled by the following points:
b (x=0.16, t=5.0, u=0.4)
f (x=0.16, t=4.0, u=0.5)
g (x=0.24, t=7.3, u=0.5)
c (x=0.24, t=9.0, u=0.4)
and a second lower face encircled by the following points:
f (x=0.16, t=4.0, u=0.5)
j (x=0.16, t=3.3, u=0.6)
k (x=0.24, t=5.8, u=0.6)
g (x=0.24, t=7.3, u=0.5).

27 more elements