X-Ray detector of semiconductor type
AssigneeHoriba, Ltd.
InventorOsamu Kimura
Life of this patent
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Abstract
An X-ray detector of semiconductor type in which reflected electrons emitted from a sample are diverted to another direction by the action of a magnetic field provided across a passage for X-rays from a sample to an X-ray detecting element of semiconductor type, and an absorbent for absorbing reflected electrons is arranged ahead of the magnetic field in the path of the diverted reflected electrons, so as to prevent the reflected electrons from being incident on the X-ray detecting element, thereby improving the S/N ratio of the detecting element.
Claims12
An X-ray detector with a semiconductor detecting element, for detecting X-rays emitted from a sample, upon impingement of an electron beam, in a first direction along a path, comprising:
- means for generating a magnetic field perpendicular said first direction across said path so as to divert electrons along said path in directions perpendicular thereto;
- first electron absorber means, located between said magnetic field means and said detector element and outside of said path, for absorbing said electrons diverted by said magnetic field means;
- means, connected to said magnetic field generating means and surrounding said path, for strengthening said magnetic field across said path;
- means, surrounding said magnetic field generating means and said magnetic field strengthening means, for constraining said magnetic field to within said magnetic field strengthening means, thereby protecting said electron beam from magnetic field lines generated by said magnetic field generating means;
- and
- second electron absorber means, disposed between said path and said magnetic field generating means, for absorbing electrons directed toward, and preventing fluorescent X-rays from being emitted from, said magnetic field generating means, said magnetic field constraining means and said magnetic field strengthening means.
Dependencies are inferred from the claim text.