Method for increasing the peel strength of metal-clad polymers
AssigneeUop LLC
InventorAnthony J. Polak
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Abstract
The peel strength of metal-clad polymers such as a polyimide polymer may be increased by treating said polymer with a gas plasma prior to the deposition of the metal thereon. The gas plasma is provided for by the introduction of a gas such as helium, argon, compositions of gases such as carbon tetrafluoride and oxygen over the surface of the polymer while said polymer is in an electrical field in which the power may range from about 3.8.times.10.sup.-3 watts/cm.sup.2 to about 100 watts/cm.sup.2.
Claims6
A process for increasing the peel strength of a metal-clad polyimide polymer which comprises subjecting said polyimide polymer to a carbon tetrafluoride/oxygen gas plasma in an electrical field generated from an electrical power of from about 3.8.times.10.sup.-3 watts/cm.sup.2 to about 100 watts/cm.sup.2 at a temperature of from about ambient to about the glass transition temperature of said polyimide polymer and a pressure in the range of from about 5 atmospheres to about 10.sup.-6 torr for a period of time ranging from about 0.1 minutes to about 4 hours, thereafter depositing a conductive metal on the resultant treated polyimide polymer and recovering the resultant metal-clad polyimide polymer processing increased peel strength.
Dependencies are inferred from the claim text.