US 4,380,074 A · Integrated circuit laser and electro-optical amplifier

Abstract

In accordance with the present invention, a laser device is formed on an integrated circuit substrate, such as a silicon chip by sandwiching a thin-film amorphous semiconductor between reflective electrodes. The upper electrode is made only partially reflective so that, when an operating potential is applied between the electrodes, a stimulated emission of light energy in the infrared range is observed and this emission occurs through the upper electrode. To form a light amplifier, the lower reflecting electrode is omitted, so that the amorphous semiconductor and the substrate form a heterojunction which has low infrared reflectivity. In operating the amplifier, a potential is applied between the upper electrode and the substrate to control amplification. Incident radiation passes through the upper electrode and into the amorphous semiconductor and substrate and, in the process, is amplified in accordance with the value of the applied potential. This permits the incident radiation to be modulated in accordance with the applied potential. In a preferred embodiment incorporating the invention, at least one laser and an amplifier are incorporated on the same substrate as electronic circuits handling information signals. The laser is a source of light radiation and the amplifier is controlled with a voltage signal from the electronics to modulate laser radiation. Radiation is coupled between the laser and the amplifier and also out of the amplifier by means of optical wave guides which are fabricated on the substrate. The modulated radiation in the wave guide from the amplifier can then be provided directly to a fiber optic "transmission line".

Claims10

Dependent claims

An opto-electronic device capable of being integrated on a substrate capable of having electronic integrated circuits fabricated thereon, said device being particularly suited for use as a source of laser energy radiation, comprising:

a first electrically conductive sheet;
a film of amorphous semiconductor material mounted in contact with said first electrically conductive sheet intermediate said sheet and said substrate, said first electrically conductive sheet and said substrate including means for applying an electrical signal therebetween;
a second electrically conductive sheet mounted on said substrate so that said film of amorphous semiconductor material is sandwiched between said first and second conductive sheets;
and
one of said electrically conductive sheets being made of a material which partially reflects and is partially transparent to laser radiation, the other electrically conductive sheet being made of a material which substantially entirely reflects laser radiation, said radiation being emitted from said device through said one conductive sheet upon the application of an electrical signal between said conductive sheets.

2 more elements

An opto-electronic device capable of being integrated on a substrate capable of having electronic integrated circuits fabricated thereon, said device comprising:

a first electrically conductive sheet made of a material which at least partially reflects radiant light mounted in opposed relationship with respect to said substrate;
a film of amorphous semiconductor material mounted in contact with said first electrically conductive sheet intermediate said sheet and said substrate, said first electrically conductive sheet having means for applying an electrical signal thereto;
and
means for transmitting radiant light energy between said film and the exterior of said opto-electronic device.

1 more element

Dependencies are inferred from the claim text.

Integrated circuit laser and electro-optical amplifier

Life of this patent

Integrated circuit laser and electro-optical amplifier

Life of this patent

Abstract

Claims10