Semiconductor device fabrication
AssigneeInternational Business Machines Corporation
InventorsHarold J. Hovel, Jerry M. Woodall
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Abstract
Semiconductor devices can be fabricated using as an intermediate manufacturing structure a substrate of one semiconductor with a thin epitaxial surface layer of a different semiconductor with properties such that the semiconductors each have different solubilities with respect to a metal. When a vertical differentiation is used to expose the different materials and the metal is deposited on both and heated, the metal will form a Schottky barrier in one material and an ohmic contact in the other. Where the substrate is gallium arsenide and the epitaxial layer is gallium aluminum arsenide and the metal is tin, a self-aligned gallium arsenide MESFET is formed wherein the tin forms ohmic contacts with the gallium arsenide and a Schottky barrier contact with the gallium aluminum arsenide.
Claims4
The process of fabrication of semiconductor structures by the steps of providing a semiconductor body having at least two layers;
- an exposed first layer having a different solubility in a particular metal than a second underlying layer;
- providing a vertical differentiation of semiconductor device elements by selective removal of portions of said first layer thereby exposing regions of said second layer;
- applying said particular metal to said regions of said second layer and to the remaining portions of said first layer and fusing said metal and the underlying semiconductor material.
In the fabrication of semiconductor devices by forming device elements in different areas of a semiconductor substrate by employing a vertical differentiation of areas of said substrate, the improvement comprising:
- providing the substrate with layers of different semiconductor materials each capable of producing a different device element or fusion with a specific metal;
- exposing areas of the layers of the different semiconductor materials to provide the device regions;
- and
- fusing said specific metal into each exposed regions.
Dependencies are inferred from the claim text.