# US 4,378,168 A · Dew point detection method and device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 4,378,168 A - Document ID: US4378168A - Status: Granted - Kind: A - Application number: 06/238,563 - Filed: 1981-02-26 - Granted: 1983-03-29 - Earliest claimed: 1980-02-29 - Assignees: Vaisala Oy - Inventors: Heikki Kuisma; Tapio Wiik - Web page: https://patentgrep.com/patent/US4378168A ## CPC - G01N 25/66: by investigating dew-point - G01N 2291/02845: Humidity, wetness - G01N 2291/02881: Temperature - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract A piezoelectric sensor consists of material for transmitting elastic waves and has a surface subjected to the condensation and presence of dew and liquid to be detected. A wave producing device includes a transmitter for producing an acoustic surface wave on the surface in conjunction with piezoelectric phenomena of the sensor. A detector includes a receiver for receiving the wave after transmission thereof across the surface. The wave is variably attenuated in transmission between the transmitter and receiver in accordance with dew or liquid on the surface. A measuring device measures the attenuation of the detected wave and thereby indicates the dew point or presence of liquid on the surface. ## Claims ### Claim 1 A method of dew point detection utilizing a piezoelectric sensor having a surface for detecting the presence of dew or other liquid, said method comprising the steps of producing an acoustic surface wave on the surface of the sensor; subjecting the surface of the sensor directly to the condensation and presence of dew and liquid to be detected thereby providing said condensation, dew and liquid directly on said surface and in contact with said acoustic wave; detecting said wave after transmission thereof across said surface; and measuring a parameter of the detected wave corresponding to the dew or liquid and thereby indicating the dew point or presence of liquid on said surface. ### Claim 2 (depends on 1) A method as claimed in claim 1, wherein said parameter is the attenuation of said wave and said attenuation varies in accordance with dew or liquid on said surface. ### Claim 3 (depends on 2) A method as claimed in claim 2, wherein said attenuation increases with increased dew or liquid and the increased attenuation is detected, and further comprising the steps of detecting and measuring the dew point temperature wherefrom the relative humidity may be determined. ### Claim 4 (depends on 2) A method as claimed in claim 2, further comprising the step of controlling the temperature of said sensor in a manner whereby said temperature increases and decreases cyclically on both sides of the dew point temperature. ### Claim 5 (depends on 2) A method as claimed in claim 2, further comprising the step of controlling the temperature of said sensor in response to measurement of said attenuation in a manner whereby said temperature is substantially continuous. ### Claim 6 A device for dew point detection, comprising a piezoelectric sensor having a surface directly subjected to the condensation and presence of dew and liquid to be detected whereby said condensation, dew and liquid are provided directly on said surface; wave producing means for producing an acoustic surface wave on the surface of said sensor whereby said condensation, dew and liquid are in contact with said acoustic wave; detecting means for detecting said wave after transmission thereof across said surface; and measuring means for measuring a parameter of the detected wave corresponding to the dew or liquid and thereby indicating the dew point or presence of liquid on said surface. ### Claim 7 (depends on 6) A device as claimed in claim 6, wherein said sensor consists of material for transmitting elastic waves, said wave producing means including a transmitter for producing an acoustic surface wave in conjunction with piezoelectric phenomena of said sensor, and said detecting means including a receiver for receiving said wave, said wave being variably attenuated in transmission between said transmitter and receiver in accordance with dew or liquid on said surface, said measuring means measuring the attenuation of said wave. ### Claim 8 (depends on 7) A device as claimed in claim 7, wherein said attenuation increases with increased dew or liquid and said detecting means detects the increased attenuation, and further comprising temperature detecting and measuring means for detecting and measuring the dew point temperature wherefrom the relative humidity may be determined. ### Claim 9 (depends on 8) A device as claimed in claim 8, wherein said temperature detecting and measuring means comprises a thermoelement. ### Claim 10 (depends on 9) A device as claimed in claim 9, wherein said electrically insulating material consists of silicon dioxide and has a thickness in the range of 1000 to 3000 A. ### Claim 11 (depends on 7) A device as claimed in claim 7, further comprising temperature control means for controlling the temperature of said sensor in a manner whereby said temperature increases and decreases cyclically on both sides of the dew point temperature. ### Claim 12 (depends on 11) A device as claimed in claim 11, wherein said temperature control means comprises a Peltier element for cyclically cooling said sensor. ### Claim 13 (depends on 7) A device as claimed in claim 7, further comprising temperature control means for controlling the temperature of said sensor in a manner whereby said temperature is substantially continuous. ### Claim 14 (depends on 6) A device as claimed in claim 6, wherein said sensor consists of material for transmitting elastic waves and said wave producing means includes a transmitter for producing an acoustic surface wave in conjunction with piezoelectric phenomena of said sensor, and further comprising means for determining the input impedance of said transmitter, said input impedance varying in accordance with the dew point or presence of liquid on said surface. ### Claim 15 (depends on 6) A device as claimed in claim 6, wherein said wave producing means includes an electric oscillator having an oscillation frequency in the range of tens of megaHertz to hundreds of megaHertz. ### Claim 16 (depends on 6) A device as claimed in claim 6, wherein said sensor comprises a substrate having a surface which is said surface of said sensor, said wave producing means including a transmitter structure on said surface for producing an acoustic surface wave in conjunction with piezoelectric phenomena of said substrate and said detecting means including a receiver structure on said surface for receiving said wave, each of said transmitter and receiver structures comprising at least one electrode pattern of electrically conductive material and including contacts for supplying electrical energy to and deriving electrical energy from said sensor. ### Claim 17 (depends on 16) A device as claimed in claim 16, wherein the electrode patterns of said transmitter and receiver structures have electrodes and said transmitter structure includes a finger pattern between the electrodes of said electrode pattern of said transmitter structure, and said receiver structure includes a finger pattern between the electrodes of said electrode pattern of said receiver structure, the finger patterns of said transmitter and receiver structures being similar and spaced from each other. ### Claim 18 (depends on 17) A device as claimed in claim 17, further comprising a protective layer of electrically insulating material covering said electrode and finger patterns. ### Claim 19 (depends on 17) A device as claimed in claim 17, wherein the finger patterns of said transmitter and receiver structures are spaced from each other a distance equal to .lambda./4, 3.lambda./4, 5.lambda./4, 7.lambda./4, . . . , where .lambda. is the wavelength of said wave. ### Claim 20 A method of measuring the volatility of a liquid utilizing a piezoelectric sensor having a surface for detecting the volatility of a liquid, said method comprising the steps of producing an acoustic surface wave on the surface of the sensor; subjecting the surface of the sensor directly to the presence of liquid the volatility of which is to be measured thereby providing said liquid directly on said surface and in contact with said acoustic wave; detecting said wave after transmission thereof across said surface; and measuring a parameter of the detected wave corresponding to the liquid, said parameter being a factor in the determination of the volatility of liquid on said surface. ### Claim 21 (depends on 20) A method as claimed in claim 20, wherein said liquid is water, said wave is variably attenuated in transmission across said surface in accordance with water on said surface and said parameter is the attenuation of said wave, and further comprising the steps of cooling the temperature of said surface below the dew point whereby water condenses in the path of said wave, heating said surface to the ambient temperature whereby water begins to evaporate from said surface and the attenuation of said wave commences to diminish, and measuring the period of time during which the attenuation of said wave diminishes from one predetermined value to another, the measured time being another factor in the determination of the volatility. ### Claim 22 A device for the detection of the volatility of a liquid, said device comprising a piezoelectric sensor having a surface directly subjected to a liquid the volatility of which is to be measured thereby providing said liquid directly on said surface; wave producing means for producing an acoustic surface wave on the surface of said sensor thereby providing said liquid in contact with said acoustic wave; detecting means for detecting said wave after transmission across said surface; and measuring means for measuring a parameter of the detected wave corresponding to the liquid, said parameter being a factor in the determination of the volatility of liquid on said surface. ### Claim 23 (depends on 22) A device as claimed in claim 22, wherein said liquid is water, said wave is variably attenuated in transmission across said surface in accordance with water on said surface and said measuring means measures the attenuation of said wave, and further comprising temperature control means for cooling the temperature of said surface below the dew point whereby water condenses in the path of said wave and for heating said surface to the ambient temperature whereby water begins to evaporate from said surface and the attenuation of said wave commences to diminish, and time measuring means for measuring the period of time during which the attenuation of said wave diminishes from one predetermined value to another, the measured time being another factor in the determination of the volatility.