High speed optoelectronic switch
AssigneeMassachusetts Institute of Technology
InventorsFrederick J. Leonberger, Frederick J. O'Donnell
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AssigneeMassachusetts Institute of Technology
InventorsFrederick J. Leonberger, Frederick J. O'Donnell
Estimating the term…
An optoelectronic switch has been formed from a semi-insulating substrate of indium phosphide doped with a deep level impurity and disposed intermediate a microstrip transmission line. One conductor of the transmission line has a small gap in its metallization. Upon illumination of the gap by laser pulses which are absorbed near the semiconductor surface, a photogenerated electron-hole plasma forms thereby providing a conducting path across the gap turning the switch "on." A process of fabricating the switch is described, an important feature of which is a heat-treatment process which improves the response time of the switch to .about.50 picoseconds. Another important part of the invention is the formation of an optically semi-transparent metallic film at the gap surface. This provides greater efficiency in the coupling of light into the device at the gap while at the same time maintaining a short electronically non-conductive gap and thus a relatively low ON-state impedance for the switch.
An optoelectronic switch responsive to low power high repetition rate photon pulses comprising:
An optoelectronic switch comprising:
In an optoelectronic switch having a semi-insulating substrate intermediate two planar electrically conductive layers one of which has a space therein providing an electrically non-conductive gap with edges:
An optoelectronic switch comprising:
A dual frequency optoelectronic switch comprising:
An optoelectronic switch comprising first and second electrically conductive planar strips, the first said strip interrupted by a non-conductive gap, said strips being mounted in parallel on a semi-insulating substrate;
Dependencies are inferred from the claim text.