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AssigneeInternational Business Machines Corporation
InventorsHans C. Pfeiffer, Guenther O. Langner, Maris A. Sturans
Estimating the term…
An electron beam projection system having a projection lens arranged so that upon pre-deflection of the electron beam the electron optical axis of the lens shifts to be coincident with the deflected beam. The projection system includes means for producing an electron beam, means for deflecting the beam, a magnetic projection lens having rotational symmetry for focusing the deflected beam and a pair of magnetic compensation yokes positioned within the bore of the projection lens means. The pair of correction yokes has coil dimensions such that, in combination, they produce a magnetic compensation field proportional to the first derivative of the axial magnetic field strength distribution curve of the projection lens. Upon application of current to the pair of compensation yokes the electron optical axis of the projection lens shifts to the position of the deflected beam so that the electron beam remains coincident with the shifted electron optical axis and lands perpendicular to a target.
An electron beam projection system having a projection lens arranged so that upon predeflection of the electron beam the electron optical axis of the lens shifts to be coincident with said deflected beam comprising
In an electron beam column:
Dependencies are inferred from the claim text.