Etchant composition and use thereof
AssigneeInternational Business Machines Corporation
InventorsRaymond W. Angelo, Peter Bakos
Life of this patent
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Abstract
An aqueous acidic composition suitable for etching containing an acid and polyvinyl alcohol and use thereof.
Claims11
An acidic aqueous etchant composition having a pH of about 5 or less suitable for etching chrome containing water, about 2 to 50% by weight of hydrochloric acid, polyvinyl alcohol in an amount of about 1 to about 25% by weight and being sufficient to improve the uniformity of the etching, and transition metal ions in an amount of about 0.1 to about 8% by weight and being sufficient to accelerate the etching, wherein said transition metal ions are selected from the group of nickel, cobalt, and mixtures thereof.
Dependencies are inferred from the claim text.