Cylindrical cathode for magnetically-enhanced sputtering
AssigneeBattelle Development Corporation
InventorBogdan Zega
Life of this patent
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Abstract
In this cylindrical, magnetically-enhanced, sputtering cathode, the magnetic field at the cathode target is generated by applying an electric current through a hollow electrical conductor disposed within a tubular target, so that the electric current flowing along this conductor induces circular magnetic lines concentrically around its axis. By biasing negatively the tubular target immersed in a low pressure gas, a glow discharge is generated. Electrons, emitted from the target surface are accelerated radially by the electric field, but deviated perpendicularly by the magnetic field. The resulting motion is confined in a spirally-shaped area centered on the conductor axis.
Claims9
A cylindrical, magnetically-enhanced, sputtering cathode which produces a thin film on the surface of an object, which comprises:
- a tubular target;
- a hollow electrical conductor disposed within the tubular target;
- means for applying an electric current through the conductor which generates a magnetic field around the tubular target;
- and
- means for circulating a liquid coolant through the electrical conductor.
A method of producing a thin film onto a substrate within a cylindrical, magnetically-enhanced, cathodic sputtering apparatus, which comprises:
- providing a hollow electrical conductor disposed within a tubular target and at least one anode located outside the tubular conductor;
- circulating a liquid coolant through the electrical conductor;
- applying an electric current through the conductor which generates a magnetic field around the tubular target;
- and
- generating a glow discharge between the tubular target and the anode.
Dependencies are inferred from the claim text.