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US 4,375,690 AGranted
Multi-phase silent discharge gas laser apparatus
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsNorikazu Tabata, Shigenori Yagi, Takanori Ueno, Shuji Ogawa
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Abstract
A silent discharge gas laser apparatus has three or more electrodes arranged in axial symmetry with the laser radiation axis and supplied with voltage from a multi-phase high frequency power source to establish a continuous discharge and a higher discharge density at reduced frequencies, particularly in the central region of the discharge zone.
Claims11
A silent discharge gas laser apparatus, comprising:
- (a) means defining a laser resonator,
- (b) means for establishing a flow of gas in said resonator,
- (c) at least three electrodes arranged in axial symmetry with respect to a laser radiation axis of said resonator,
- (d) a multi-phase high frequency power source for generating voltage signals of at least three phases, and
- (e) means for applying said voltage signals across the electrodes.
2 more elements
A silent discharge gas laser apparatus, comprising:
- (a) a discharge tube made of a dielectric material and defining a discharge zone therewithin,
- (b) means for establishing a flow of gas in said discharge tube,
- (c) at least three electrodes disposed on an outer wall of the discharge tube in axial symmetry therewith,
- (d) a multi-phase high frequency power source for generating voltage signals of at least three phases, and
- (e) means for applying said voltage signals across the electrodes.
2 more elements
A silent discharge gas laser apparatus, comprising:
- (a) at least three electrode tubes arranged in axial symmetry with respect to an axis of laser radiation,
- (b) dielectric material covering said tubes,
- (c) means for establishing a flow of gas in a resonance zone between said tubes,
- (d) a multi-phase high frequency power source for generating voltage signals of at least three phases, and
- (e) means for applying said voltage signals across the electrode tubes.
2 more elements
Dependencies are inferred from the claim text.