Excitation system for a fast pulsed discharge
AssigneeKraftwerk Union Aktiengesellschaft
InventorsHans-Jurgen Cirkel, Willi Bette
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AssigneeKraftwerk Union Aktiengesellschaft
InventorsHans-Jurgen Cirkel, Willi Bette
Estimating the term…
Excitation system for fast pulsed discharge with excitation by a highly homogeneous arc-free capacitor-discharge in a gas space between and defined by at least two electrodes of a laser chamber, the two electrodes being spaced from one another and extending parallel to the optical axis of the laser, and with first and second stripline capacitors for induction-free energy-storage and for contacting the laser electrodes and electrodes of a fast high-voltage switching gap associated therewith, respectively, includes a plurality of electrodes forming part of the first and the second stripline capacitors, a plurality of dielectric layers disposed between the capacitor electrodes, the dielectric layers and the capacitor electrodes extending substantially normally to the optical axis of the laser and being stacked substantially parallel to the optical axis of the laser in a capacitor stack, and laterally extending connecting lugs connecting the capacitor electrodes to the electrodes of the laser chamber.
An excitation system for fast pulsed discharge with excitation by a highly homogeneous arc-free capacitor-discharge in a gas space between and defined by two mutually opposed electrodes disposed within a discharge chamber in a laser, the two electrodes extending in mutual alignment, parallel to the optical axis of the laser and having edges spaced from one another, and with first and second stripline capacitors for low-induction energy-storage, the stripline capacitors having electrodes connected within a pulse-forming network to the laser electrodes and to electrodes of a fast high-voltage switching gap, respectively, high-voltage pulses for the laser electrodes being producible through ignition of the high-voltage switching gap by means of discharge of the stripline capacitors, dielectric layers disposed between the capacitor electrodes, the dielectric layers and the capacitor electrodes extending normally to the optical axis of the laser and being stacked parallel to the optical axis of the laser in a capacitor stack, and laterally extending connecting lugs connecting the capacitor electrodes within the pulse-forming network to the electrodes of the laser chamber, comprising, in the direction in which the dielectric layers and the capacitor electrodes are stacked, mutually adjacent, miniature common capacitance units of the individual stripline capacitors disposed, respectively, with the capacitor electrodes and dielectric layers thereof mirror-inverted relative to an imaginary symmetry plane extending normally to the laser axis between said capacitance units so that the mutually opposing capacitor electrodes of the respectively mutually adjacent capacitance units are at the same potential and are combinable into common capacitor electrodes.
An excitation system for fast pulsed discharge with excitation by a highly homogeneous arc-free capacitor discharge in a gas space between and defined by two mutually opposed electrodes disposed within a discharge chamber in a laser, the two electrodes extending in mutual alignment parallel to the optical axis of the laser and having edges spaced from one another, and with first and second stripline capacitors for low-induction energy storage, the stripline capacitors having electrodes connected within a pulse-forming network to the laser electrodes and to electrodes of a fast high-voltage switching gap, respectively, high-voltage pulses for the laser electrodes being producible through ignition of the high-voltage switching gap by means of discharge of the stripline capacitors, dielectric layers disposed between the capacitor electrodes, the dielectric layers and the capacitor electrodes extending normally to the optical axis of the laser and being stacked parallel to the optical axis of the laser in a capacitor stack, the laser electrodes being at a potential different from that at which the electrodes of the stripline capacitors are and being isolated from the capacitor electrodes, comprising isolating wall regions at least partly defining the laser chamber and formed of a material different from that of the laser electrodes, the laser electrodes extending within the laser chamber parallel to the optical axis of the laser, said isolating wall regions being connected to one another and to the laser electrodes so as to maintain a gas mixture in the laser chamber at a given chamber pressure.
Dependencies are inferred from the claim text.