Radiant energy sensor with reduced optical reflection and blooming
AssigneeWestinghouse Electric Corp.
InventorDieter K. Schroder
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Abstract
A radiant energy sensor is described incorporating a crystalline substrate having a surface suitable for receiving radiant energy and a plurality of detectors for converting radiant energy into electrical signals wherein optical reflections and blooming between detectors is reduced by optical absorption of the radiant energy in heavily doped layers positioned at or beyond the ends of the detectors.
Claims16
A sensor for converting radiant energy having a wavelength greater than 3 micrometers into electrical signals and for suppressing optical crosstalk comprising:
- a crystalline substrate having a semiconductor first surface suitable for receiving radiant energy;
- said substrate including a plurality of detectors for generating electronic charge in response to the passing of radiant energy through said first surface;
- and
- means for absorbing a portion of said radiant energy passing through said first surface and propagating beyond a predetermined distance in said crystalline substrate below said first surface;
- said means for absorbing including a heavily doped layer of impurities to provide substantial optical absorption in said layer by the mechanism of free carrier absorption.
The sensor of claim 8 wherein said substrate is doped with indium and said doped layer is doped with Boron.
The sensor of claim 15 wherein said impurities of a first type are N-type;
- said first electrodes are N+ type regions;
- and
- said second electrode is an N+ type region.
Dependencies are inferred from the claim text.