Scanning electrode vibration electrodeposition method

Abstract

An electrodeposition method and apparatus, particularly suitable for electrodeposition of a substrate of large area and intricate contour, uses an electrode having a small electrode area adapted to be spacedly juxtaposed with a portion of the substrate to define a small electrodeposition gap flushed with a stream of liquid electrolyte. High-frequency and small mechanical vibrations are imparted to the electrode while an electrodeposition current, preferably in the form of pulses, is passed between the electrode and the workpiece, which are relatively displaced by a drive unit to cause the electrode area to sweep three-dimensionally over a selected surface area of the substrate, thereby forming a layer of the electrodeposition thereon of a desired uniform thickness with an increased rate. The electrode is preferably constituted as an electrode assembly comprising an electromechanical transducer, a horn and the electrode attached in sequence. Drive means responds to a numerical controller to produce a three-dimensional displacement between the electrode assembly and the substrate. An automatic electrode changing unit is associated with the numerical controller for successively bringing a plurality of different electrodes into electrodeposition positions to act on successive surface regions of the contoured substrate.

Dependencies are inferred from the claim text.