Differential pressure measuring transducer assembly
AssigneeHitachi, Ltd.
InventorsMichitaka Shimazoe, Yoshitaka Matsuoka, Ryozo Akahane, Yasushi Shimizu, Hideyuki Nemoto, Masanori Tanabe
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AssigneeHitachi, Ltd.
InventorsMichitaka Shimazoe, Yoshitaka Matsuoka, Ryozo Akahane, Yasushi Shimizu, Hideyuki Nemoto, Masanori Tanabe
Estimating the term…
A differential pressure measuring transducer assembly including a measuring diaphragm formed of semiconductor material having gauge resistance elements on one surface thereof and a central boss area of large thickness and a peripheral support flange on the other surface thereof defining therebetween an annular portion of small thickness. The measuring diaphragm is attached at the peripheral support flange to a glass support member and a metallic support member formed with pressure conducting bores respectively communicating with each other. The metallic support member is formed of material having a Young's modulus substantially equal to that of the measuring diaphragm.
A differential pressure measuring transducer assembly comprising:
A differential pressure measuring transducer assembly comprising:
Dependencies are inferred from the claim text.