Magnetic thin film and method of making it
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsNorimoto Nouchi, Kenji Kanai, Nobuyuki Kaminaka, Noboru Nomura
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Abstract
A magnetic thin film is composed of an oxide of Fe.sub.x Co.sub.y Cu.sub.z having spinel structure wherein x, y and z represent respective atomic ratios, x+y+z=1, 0.50.ltoreq.x<0.95, 0.05<y.ltoreq.0.30 and 0.ltoreq.z<0.20. Such film exhibits high coercive force and good squareness. The film is made by vapor depositing a material containing at least one of Fe.sub.x Co.sub.y Cu.sub.z alloys and oxides thereof onto a substrate held at a temperature between 200.degree. and 500.degree. C. under an oxygen atmosphere with the pressure of above 10.sup.-4 Torr but below 10.sup.-3 Torr.
Claims3
A method of making a magnetic thin film consisting essentially of the steps of:
- (a) preparing a deposition material including at least one of Fe.sub.x Co.sub.y Cu.sub.z alloys and oxides of said alloys, wherein x, y and z represent the respective atomic ratios, x+y+z=1, 0.50.ltoreq.x<0.95, 0.05<y.ltoreq.0.30 and 0<z.ltoreq.0.20;
- (b) in a container, vapor depositing a film of said deposition material into a substrate held at a temperature between 200.degree. and 500.degree. C. under oxygen pressure in the range above 10.sup.-4 Torr, but below 10.sup.-3 Torr;
- and,
- (c) annealing said deposited film for at least 18 minutes under an oxygen pressure above 10.sup.-4 Torr, but below 760.times.(1/5) Torr, with said substrate being held at a temperature between 200.degree. and 500.degree. C.
Dependencies are inferred from the claim text.