Method of manufacturing a gas sensing device
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsAtsushi Abe, Hisahito Ogawa, Masahiro Nishikawa, Satoshi Sekido, Shigeru Hayakawa
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Abstract
A gas sensing device comprises a gas sensing element comprising a gas-sensitive resistive film formed of an aggregate of ultrafine particles of a suitable material deposited on the surface of a substrate of an electrical insulator formed with electrodes. In a method of manufacturing such a gas sensing device, a gas-sensitive material is evaporated in a gas atmosphere to provide the gas-sensitive resistive film of ultrafine particles of the material.
Claims9
A method of manufacturing a gas sensing device comprising the step of evaporating a material including at least one of a metal and its oxide in an atmosphere containing oxygen gas at a reduced pressure of an atmosphere containing an inert gas at a reduced pressure, thereby depositing a gas-sensitive resistive film of ultrafine particles having a mean diameter of between 10 and several hundred angstroms of said material on one of the major surfaces of a substrate of an electrical insulating material formed with electrodes to provide a gas sensing element.
Dependencies are inferred from the claim text.