US 4,362,125 A · Quartz oscillator measuring head

Abstract

An oscillator crystal measuring head is disclosed, for vacuum coating apparatus, intended for measuring the mass of substance which is deposited on an oscillator crystal during a deposition of thin layers, and by which the frequency of the crystal is changed. To obtain a longer, continuous measuring period, the measuring head is designed with a crystal changer in the form of a rotary support and to ensure that always identical surface areas of each crystal are coated, further apertured screens are provided in addition to an apertured screen which is fixed to the housing. These further screens are moved along with the individual crystals and can be pressed, in their measuring position, into heat conducting contact with the fixed screen. The movable screens may be designed as a single rotary screen plate which can be pressed against the fixed screen by a spring.

Claims7

Dependent claims

In an oscillator crystal measuring head for vacuum coating apparatus, for determining the mass of substance which is being deposited on an oscillator crystal during a deposition of thin layers by a vapor stream, and by which the frequency of the crystal is changed, comprising a housing, a support accommodated in said housing for at least one oscillator crystal, at least one electrical conductor connected to a mechanism for clamping the oscillator crystal and a screen rigidly connected to the housing and provided with a window exposing one side of the oscillator crystal to the vapor stream to be measured during the measuring operation, the improvement comprising, said support being mounted in said housing for performing a rotary motion and provided with retaining mechanisms for a plurality of oscillator crystals, each individual oscillator crystals being associated with further screens which are movable along therewith and provided with apertures to define surface areas of each crystal to be coated with at least the screen of the oscillator crystal just occupying its measuring position brought into a heat conducting pressure contact with the screen which is connected to the housing.

An oscillator crystal measuring head for coating apparatus used to determine the mass of substance which is being deposited on an oscillator crystal during a vapor stream deposition of a thin layer of material comprising:

a housing defining an oscillator crystal chamber;
a movable screen plate having a plurality of apertures therein rotatably mounted in said chamber;
mounting means connected to said movable screen plate for mounting an oscillator crystal over each of said apertures;
said housing having a fixed screen plate with a window therein, said movable screen plate movable to a plurality of positions with a single movable screen plate aperture aligned with said fixed screen plate window at a time to expose an oscillator crystal which is associated with said aligned movable screen plate aperture;
contact means connected to said housing and engageable with one of said mounting means at a time for establishing electrical contact with an oscillator crystal associated with said one mounting means;
and
biasing means connected between said housing and said movable screen plate for biasing said movable screen plate against said fixed screen plate to establish thermal contact therebetween.

4 more elements

Dependencies are inferred from the claim text.

Quartz oscillator measuring head

Life of this patent

Quartz oscillator measuring head

Life of this patent

Abstract

Claims7