Process for making sensor for detecting fluid flow velocity or flow amount
AssigneeHitachi, Ltd.
InventorsHideo Arima, Mituko Ito, Akira Ikegami, Sadayasu Ueno, Kanemasa Sato, Yutaka Nishimura
Life of this patent
Estimating the term…
Loading patent…
AssigneeHitachi, Ltd.
InventorsHideo Arima, Mituko Ito, Akira Ikegami, Sadayasu Ueno, Kanemasa Sato, Yutaka Nishimura
Estimating the term…
A sensor for detecting a fluid flow velocity or flow amount with high precision and high reliability is made by applying a conductor paste comprising platinum powder and an organic vehicle to the outer surface of a fine inorganic insulating tube, followed by drying and firing, thereby forming a platinum film, processing the platinum film into a spiral band form by laser application, inserting a lead wire into the insulating tube, applying a platinum conductor paste to between the spiral platinum band and the lead wire, followed by drying and baking, thereby connecting the spiral platinum band film to the lead wire.
In a process for making a sensor for detecting a fluid flow velocity or flow amount, which comprises a step of applying an electroconductive paste containing platinum powder to the outer surface of an insulating tube, and firing the paste, thereby forming a platinum film on the outer surface of the insulating tube, a step of preparing a spiral groove on the platinum film by laser processing, thereby forming a platinum resistor band having a predetermined resistance while eliminating platinum remains from the groove, and a step of coating the platinum resistor band with amorphous glass, the improvement comprising said electroconductive paste containing platinum powder consisting of 65-85% by weight of platinum powder and 35-15% by weight of an organic vehicle, with said platinum powder uniformly dispersed in said organic vehicle, and the firing of the paste is carried out at a temperature of 1100.degree. to 1400.degree. C. for at least 20 minutes, whereby a sensor for detecting a fluid flow velocity or flow amount with a high precision of resistance and a high mechanical strength at low cost is formed.
A process according to claim 12, wherein the spiral groove prepared by laser application has a groove width of 7-100 .mu.m, and a pitch of 50-500 .mu.m.
Dependencies are inferred from the claim text.