Nozzle for the continuous depositing of a layer of solid material on a substrate
AssigneeSocieta Italiana Vetro - SIV - S.p.A.
InventorsReinhard Kalbskopf, Otto Baumberger
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Abstract
A nozzle for depositing a layer of solid material on a heated substrate, in particular by chemical vapor deposition, comprises three supply chambers for gas, which chambers communicate with three prismatic spaces which converge towards an outlet slot divided into three by two longitudinal strips which are tensioned at both ends and are applied against support surfaces which provide the strips with their respective inclinations centered on the truncated apex of a prismatic cavity which is divided by the strips to form the prismatic spaces. This arrangement enables a uniform spacing of the outlet slots of the spaces to be maintained whatever the length of the nozzle.
Claims7
A nozzle for the continuous deposition on a heated substrate of a layer of solid material produced by the reaction at said substrate of at least two tangentially adjacent gas streams, which nozzle comprises enclosure means defining therein a prismatic cavity having a truncated apex which forms a longitudinal outlet slot;
- two metal strips each extending along the prismatic cavity and over the entire height thereof, thereby dividing said cavity into three substantially equal prismatic volumes, each strip having a longitudinal edge disposed in said longitudinal slot, said edges dividing said longitudinal slot into three parallel slots;
- means defining at least one inlet aperture communicating with each of said prismatic volumes for admission of a respective reagent;
- support surfaces disposed in the vicinity of each of the strip ends, each support surface having a respective inclination such that said surface is aligned with said truncated apex, said strips having respective end regions disposed in contact with respective said support surfaces for locating said strips in alignment with said apex;
- and longitudinal tensioning means connected to said strips for maintaining said strips in contact with said support surfaces.
Dependencies are inferred from the claim text.