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US 4,359,282 AGranted
Optical measuring method and apparatus
AssigneeAmpex Corporation
InventorMarvin C. Garrison
Life of this patent
Estimating the term…
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AssigneeAmpex Corporation
InventorMarvin C. Garrison
Estimating the term…
A method and apparatus for measuring vertical surface variations of a specimen is disclosed wherein the specimen is mounted in movable relation to an objective lens assembly, a reticule being arranged at a focal plane of the objective lens assembly, movement between the objective assembly and the specimen necessary for maintaining the reticule in focus upon different surface portions of the specimen providing an indication of vertical spacing between the surface portions. Another embodiment of the invention contemplates a three-dimensional reticule arranged at or adjacent a focal plane of an objective lens assembly for simultaneously focusing portions of the reticule upon different surface portions of the specimen, the reticule being adapted to provide an indication that the vertical spacing between the different surface portions of the specimen is within acceptable limits.
An optical gauge for determining if vertical surface dimensions of a specimen are within predetermined limits, comprising
In a method for determining if vertical surface dimensions of a specimen are within predetermined limits, the steps comprising mounting a specimen with relation to an objective means including means for viewing surface portions of the specimen, and arranging a three-dimensional reticule adjacent to a focal plane of the objective means for focusing portions of the reticule upon vertically spaced-apart surface portions of the specimen, the three-dimensional reticule being adapted to provide an indication of the vertical spacing between the first and second surface portions being within acceptable limits.
Dependencies are inferred from the claim text.