Synchronized voltage contrast display analysis system

Apparatus for comparing operation of a first electronic component with a second electronic component in response to the same electrical stimuli, comprising

• means for simultaneously applying said input electrical stimuli to said first and second operating electronic components,
• scanning electron microscope means for detecting internal voltage patterns of said components and producing first and second video signals at successive points scanned with an intensity proportional to the voltages at said points of respective first and second components, said video signals being produced in response to secondary electron signals generated as a result of a primary electron signals generated as a result of a primary electron beam intersecting each of said operating electronic components in accordance with a predetermined scan pattern synchronously applied to each,
• means for generating a scan control signal for said scanning electron microscope means to produce said predetermined scan pattern of electron beams, and
• means responsive to said first and second video signals for visually displaying a single video signal indicative of any difference between said first and second video signals.

An apparatus for comparing internal voltage potentials of first and second electronic components operating simultaneously in response to the same stimuli, comprising

• a scanning electron microscope means,
• means for generating a master scanning pattern,
• first means for causing said scanning electron microscope means to scan said first operating electronic component by a primary electron beam in accordance with a first predetermined scanning pattern related to said master scanning pattern, thereby creating a first secondary electron signal related to a voltage potential at the intersection of said primary electron beam and said first operating electronic component,
• second means for causing said scanning electron microscope means to scan said second operating electronic component by a primary electron beam in accordance with a second predetermined scanning pattern related to said master scanning pattern, thereby creating a second secondary electron signal related to a voltage potential at the intersection of said primary electron beam and said second operating electronic component,
• means for generating first and second video signals related to said first and second secondary electron signals respectively, and
• display means responsive to said first and second video signals for displaying a single signal representative of voltage differences between predetermined portions of said first and second video signals.

An apparatus for comparing internal voltage potentials of first and second electronic components operating simultaneously in response to the same stimuli, comprising

• a first scanning electron microscope having an output video signal related to voltage potentials within said first electronic component,
• first means for causing said first scanning electron microscope to scan said first electronic component in accordance with a predetermined scan pattern,
• a second scanning electron microscope having an output video signal related to voltage potentials within said second electronic component,
• second means responsive to said first means for causing said second scanning electron microscope to simultaneously scan said second electronic component in accordance with said predetermined scan pattern as said first electronic component is scanned,
• means for color encoding said first scanning electron microscope output video signal to correspond to a first color,
• means for color encoding said second scanning electron microscope output video signal to correspond to a second color,
• a color television monitor, and
• means for driving said color television monitor by said color encoded first and second output video signals whereby voltage differences at corresponding points on said first and second operating electronic components can be visually identified.

An apparatus for comparing internal voltage potentials of first and second electronic components operating simultaneously in response to the same stimuli comprising

• a scanning electron microscope having an output video signal related to voltage potentials within said first and second operating electronic components,
• means for generating a master scanning pattern,
• means for controlling said scanning electron microscope to alternately scan areas of said first electronic component in accordance with a first predetermined scan pattern related to said master scanning pattern, and areas of said second electronic component in accordance with a second predetermined scan pattern related to said master scanning pattern, corresponding areas of said first and second components being scanned in successive order,
• means for identifying portions of said output video signal corresponding to areas of said first predetermined scan pattern and portions of said output video signal corresponding to areas of said second predetermined scan pattern, and
• means for displaying differences between said identified portions of said output video signal related to corresponding areas of said first and second predetermined scan patterns.

A method for comparing internal voltage potentials of first and second operating electronic components, comprising the steps of

• generating a master scanning pattern,
• causing a scanning electron microscope means to scan said first operating electronic component by a primary electron beam in accordance with a first predetermined scanning pattern related to said master scanning pattern, thereby creating a first secondary electron signal related to a voltage potential at the intersection of said primary electron beam and said first operating electronic component,
• causing said scanning electron microscope means to scan said second operating electronic component by a primary electron beam in accordance with a second predetermined scanning pattern related to said master scanning pattern, thereby creating a second secondary electron signal related to a voltage potential at the intersection of said primary electron beam and said second operating electronic component,
• generating first and second video signals related to said first and second secondary electron signals, respectively, and
• visually identifying voltage differences between predetermined portions of said first and second video signals.