Method for sloping insulative layer in bubble memory
AssigneeIntel Magnetics, Inc.
InventorPeter J. Silverman
Life of this patent
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Abstract
A process is described for removing the rounded regions in a silicon dioxide layer particularly in a layer covering conductive members. The silicon dioxide layer is subjected to ion milling. The angle of incidence of the ions striking the rounded regions is greater than the angle of incidence in other regions of the layer. This causes more of the rounded regions to be removed, thereby providing a smoother, faceted surface. The process eliminates the need to taper the edges of the conductive members as done in the prior art.
Claims10
In the fabrication of a magnetic bubble memory where an insulative layer is formed over a conductive member, and wherein during the formation of said insulative layer rounded regions occur in said layer along the edges of said conductive member, a process for preparing said layer for permalloy members, comprising the steps of:
- forming said insulative layer over said conductive member to a thickness which is thicker than its ultimate thickness in said memory;
- and,
- subjecting said insulative layer to ion milling such that the angle of incidence of the ions is approximately zero degrees with respect to the planar surface of said layer and such that the angle of incidence of said ions is approximately 45 degrees at at least one point on said rounded regions occurring in said layer so as to mill said rounded regions to a greater extent than said planar regions;
- whereby said rounded regions become flatter.
In the fabrication of a magnetic bubble memory, a process for forming a permalloy member which is insulated from an underlying conductive member, comprising the steps of:
- forming an insulative layer over said conductive member;
- subjecting said insulative layer to ion milling such that the angle of incidence of the ions is approximately zero degrees with respect to the planar surfaces of said layer and such that the angle of incidence of said ions is approximately 45 degrees at at least one point on the rounded regions occurring in said layer so as to mill said rounded regions to a greater extent than said planar regions;
- and
- forming said permalloy member on said insulative layer;
- whereby said permalloy member at said rounded regions is generally flatter because of said ion milling, thereby increasing said magnetic member's magnetic characteristics in said memory.
Dependencies are inferred from the claim text.