Method for molding a fused quartz glass block
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHaruo Okamoto, Motoyuki Yamada
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Abstract
The invention provides a method for molding a block of a fused quartz glass by the plastic deformation of a starting block with smaller dimensions at a high temperature. The molding procedure is carried out in a graphite mold under compression at a temperature of 1700.degree. C. or higher in an atmosphere of helium at a pressure in the range, preferably, from 50 to 500 Torr. The cooling schedule as specified is also of importance in order that the molded quartz glass block is freed from any strain or cracks.
Claims8
A method for shaping a block of a fused quartz glass from a starting quartz glass block which comprises the steps of
- (a) placing the starting block in a mold made of graphite,
- (b) causing plastic deformation of the starting block to fill the mold by compression under an atmosphere of helium at a temperature of 1700.degree. C. or higher,
- (c) rapidly cooling the thus molded block in the graphite mold down to a temperature in the range from 1300.degree. C. to 1100.degree. C.,
- (d) slowly cooling the molded block at a temperature of 1300.degree. to 1100.degree. C. in the graphite mold down to a temperature of 900.degree. C. or below, and
- (e) taking the molded block out of the graphite mold.
Dependencies are inferred from the claim text.