Interferometric measurement apparatus and method having increased measuring range
AssigneeInternational Business Machines Corporation
InventorGunter Makosch
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Abstract
In an interferometer wherein there is provided means for directing two linearly polarized beams having their polarizations perpendicular to each other onto a surface at different angles of incidence and means for recombining the beams reflected from the object into a combined beam, the improvement wherein means for periodically varying the phase of one component of the combined beam is provided and wherein the amount of change in phase between the two component beams of the combined beam when an amplitude sensing means senses a maximum or a minimum amplitude is a measure of the topographic height variations of the object surface which is irradiated.
Claims1
Interferometric measurement apparatus having an increased measurement range, comprising:
- means for splitting a measuring beam into two linearly polarized beams laterally spaced from each other, wherein said beams are linearly polarized perpendicularly to each other;
- means for directing said beams onto an object surface at different angles of incidence, said beams thus experiencing a shift in phase with respect to each other which is a function of the topographic height variations of the object surface which is irradiated;
- means for combining said beams after interaction with the object surface to produce a combined beam;
- means (12) for periodically varying the phase relationship between said two beams;
- and
- means (13,14,15) for sensing the amplitude of the component portion of the combined beam which is linearly polarized in a predetermined direction, wherein the amount of change in the phase relationship between said two beams caused by said phase varying means when said amplitude sensing means senses a maximum or minimum amplitude is a measure of the topographic height variations of the object surface which is irradiated.
Dependencies are inferred from the claim text.