Apparatus for moving table on stage
AssigneeHitachi, Ltd.
InventorsShigeo Moriyama, Tatsuo Harada, Masaaki Ito
Life of this patent
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Abstract
An apparatus for moving a table or a stage having movable parts adapted to be guided by guide rail means slidingly and rectilinearly. At least the movable parts are made of a non-iron light metal material. The sliding surfaces of the movable parts making sliding contact with the guide rail means are made of a self-lubricating material, while the sliding surfaces of the guide rail means making sliding contact with the movable parts are made of a material having a higher hardness and wear resistance than the non-iron light metal material, so that the weight of at least the movable parts is reduced to decrease the weight of the apparatus as a whole.
Claims7
An apparatus for moving a table or a stage comprising:
- a base;
- first guide rail means laid on said base;
- first table means adapted to be guided by said first guide rail means slidingly and rectilinearly in a predetermined direction by said first guide rail means;
- second guide rail means laid on said first table means;
- and a second table means adapted to be guided slidingly and rectilinearly in the direction determined by said second guide rail means;
- wherein sliding parrts of said first and second table means respectively making sliding contact with said first and second guide rail means are made of a material having a self-lubricating nature, and wherein the sliding surfaces of said first and second guide rail means respectively making sliding contact with said first and second table means are formed of a material having a higher hardness and wear resistance than the material constituting said first and second table means.
An apparatus for moving a table or a stage comprising:
- a base;
- first guide rails laid on said base;
- an X-table adapted to be guided slidingly and rectilinearly in X direction by means of said first guide rail;
- second guide rails laid on said X-table;
- and a Y-table adapted to be guided slidingly and rectilinearly by said second guide rails in the Y direction;
- wherein at least said X and Y-tables and said second guide rails are made of non-iron light metal material, wherein the sliding parts of said X and Y-tables respectively making sliding contact with said first and second guide rails are made of a macromolecule material having a self-lubricating nature, and wherein the sliding surfaces of said first and second guide rails respectively making sliding contact with said X and Y-tables are made of a material having a higher hardness and wear resistance than said non-iron light metal material.
Dependencies are inferred from the claim text.