A method for monitoring the intensities of charged particle beams comprising the steps of, preventing the passage of a cross-sectional portion of a charged particle beam through beam intensity monitoring means, concomitantly permitting the passage of another cross-sectional portion of such charged particle beam through said beam intensity monitoring means, and concomitantly providing a signal indicative of the intensity of said charged particle beam cross-sectional portion which is prevented from passing through said beam intensity monitoring means whereby, the provision of a signal indicative of the intensity of said charged particle beam cross-sectional portion which is permitted to pass through said beam monitoring means and the determination of the ratio of that signal to the signal provided by said beam monitoring means over a predetermined range of charged particle beam intensities will enable the subsequent determination of the intensity of the charged particle beam cross-sectional portion which is permitted to pass through the beam intensity monitoring means by determination of said beam intensity monitoring means signal.