Ceramic heater
AssigneeKyoto Ceramic Co., Ltd.
InventorsShigeyoshi Yamamoto, Nobukazu Sagawa, Noriyoshi Nakanishi
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Abstract
This disclosure relates to a ceramic heater excellent in thermal shock resistance, high temperature resisting property, and free from change in resistance value even in the repeated use of the heater at high temperatures. The heater comprises a heat resisting element of high melting-point metal embedded in a ceramic body of nonoxide selected from a group consisting of silicon nitride, sialon, aluminium nitride and silicon carbide.
Claims5
A ceramic heater comprising a nonoxide ceramic material selected from the group consisting of silicon nitride, sialon, aluminum nitride and silicon carbide, wherein said ceramic material is formed into an integral body by the application of pressure and heat, said heater having a thin discrete heating element embedded in said ceramic, said heat generating element having exposed electrical terminals, said heat generating element being formed of high temperature melting-point metal having a main component selected from the group consisting of tungsten and molybdenum.
A ceramic heater comprising a nonoxide ceramic material selected from the group consisting of silicon nitride, sialon, aluminum nitride and silicon carbide, wherein said ceramic material is formed into an integral body, said heater having a thin discrete heating element embedded in said ceramic, said heat generating element having exposed electrical terminals, said heat generating element being formed of high temperature melting-point metal having a main component selected from the group consisting of tungsten and molybdenum.
Dependencies are inferred from the claim text.