Refractory oxide fabrication
AssigneeInternational Business Machines Corporation
InventorRichard F. Rutz
Life of this patent
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Abstract
Refractory oxide materials, for example, Al.sub.2 O.sub.3 (sapphire) and Al.sub.2 MgO.sub.4 (spinel) can be shaped to precise dimensions by using a preformed member having a higher melting temperature than the oxide in the outline of the desired shape placed in contact with the refractory oxide and subjecting the combination to a temperature between 1500.degree. C. and the melting temperature of the oxide in the presence of a forming gas atmosphere containing an inert gas and approximately 15% hydrogen. The refractory oxide is etched over the area of contact.
Claims5
In a process for etching a shape in a refractory oxide material taken from the group of Al.sub.2 O.sub.3, SiO.sub.2, MgO and Al.sub.2 MgO.sub.4, the improvement comprising:
- placing a preformed pattern of a material taken from the group of titanium, tantalum, zirconium and hafnium having a melting point higher than 1500.degree. C. but less than the melting temperature of said preformed pattern material in contact with said refractory oxide material, and
- heating said refractory oxide and said preform pattern combination to a range of 1500.degree. C. to the melting temperature of said preformed pattern in the presence of a neutral gas containing hydrogen for a time sufficient to effect an erosion of the surface of said refractory oxide material.
The process of etching in a direction predominantly perpendicular to the surface of a substrate of refractory oxide materials of the sapphire and spinel types comprising in combination the steps of:
- placing a preformed pattern of a material taken from the group of titanium, tantalum, zirconium and hafnium having a melting point higher than 1500.degree. C. but less than the melting temperature of said preformed pattern material in contact with the surface of said refractory oxide material,
- heating said refractory oxide material and said preformed pattern material combination to the range of 1500.degree. C. but less than the melting temperature of said preformed pattern material in the presence of a neutral gas containing hydrogen for a time sufficient to effect an erosion of the surface of said refractory oxide material under said preformed pattern, and
- removing said preformed pattern material.
Dependencies are inferred from the claim text.