Apparatus for controlling a plasma reaction
AssigneeTegal Corporation
InventorGeorges J. Gorin
Life of this patent
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Abstract
An apparatus and method for controlling a plasma etching reaction. The plasma reaction is controlled by monitoring the output voltage of an optical detector which is responsive to emissions emanating from the reaction. As the output of the detector changes indicating that the first portion of the etching process has been completed, the average power density supplied to the reaction is reduced by switching the applied power from a continuous wave to a pulsed mode. The reaction is allowed to continue to completion in the reduced power mode.
Claims7
An apparatus for controlling a plasma reaction in which a layer of material is etched in a plasma of reactants formed by the application of a radio frequency power to said reactants, said apparatus comprising:
- a detector for monitoring said reaction;
- means responsive to said detector for switching said radio frequency power from a continuous mode to a modulated mode when a change is detected in said plasma reaction.
A plasma etching apparatus wherein a reactive plasma is generated by a radio frequency field, said apparatus comprising:
- a radio frequency generator selectively operable in either a continuous or pulsed mode;
- controller means for selecting one of said continuous or pulsed modes;
- detector means for monitoring an etching reaction within said apparatus, said detector means coupled to said controller means, said controller means responsive to said detector means to switch said generator from said continuous to said pulsed mode in preselected response to said detector means.
An apparatus for controlling a plasma etching reaction wherein a first layer overlying a second layer is selectively etched in a radio frequency generated plasma, said apparatus comprising:
- a radio frequency generator for developing an electrical field for forming the plasma, said generator capable of operating in either a continuous or pulsed mode;
- control means for selecting means of said continuous or pulsed modes;
- detector means monitoring said reaction, said detector means producing an output signal responsive to reaction products resulting from said etching;
- and coupling means between said detector means and said control means, said control means switching said generator from continuous to pulsed mode in response to said output signal.
Dependencies are inferred from the claim text.