Silicon melting crucible
AssigneeRCA Corporation
InventorsSamuel Berkman, Michael T. Duffy, Harold E. Temple
Life of this patent
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Abstract
An improved liner for crucibles and dies used to melt silicon comprising one or more sheets of graphite each of which has on at least the surface facing the silicon melt a layer of silicon nitride or silicon oxynitride.
Claims11
In a crucible for forming a silicon melt, the improvement comprising providing on all internal surfaces of said crucible which might contact the molten silicon a protective lining comprising one or more thin, flexible sheets of graphite each of which has on at least the surface facing the molten silicon a layer of silicon nitride or silicon oxynitride and at least one of which has said layer on both surfaces.
Dependencies are inferred from the claim text.