Laser enhanced maskless method for plating and simultaneous plating and etching of patterns
AssigneeInternational Business Machines Corporation
InventorsLarysa H. Kulynych, Lubomyr T. Romankiw, Robert J. von Gutfeld
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Abstract
A method for high resolution maskless plating with an immersion, exchange or like plating bath is described. Preferential plating results from exposing those regions where plating is sought to an energy beam to increase the plating rate and the resulting plating thickness is several orders of magnitude greater than is possible by standard immersion techniques.
Claims9
A method for selectively plating onto a surface of a workpiece without application of an electrical potential source comprising the steps of:
- contacting said surface with a plating solution in the absence of a reducing agent and without application of an electrical potential source, and
- directing an energy beam onto the workpiece to locally heat the surface to promote plating.
A method for preferentially plating regions of a surface employing a non-photo decomposable plating solution without a reducing agent, the improvement comprising:
- directing a light beam onto the region of the surface to heat the surface locally where preferential plating is sought, said beam having an intensity of at least 10.sup.2 W/cm.sup.2.
Dependencies are inferred from the claim text.