US 4,340,166 AGranted

High speed wire bonding method

AssigneeKulicke and Soffa Industries, Inc.

InventorsGlenn B. Bilane, Lawrence M. Rubin, Albert Soffa, Dan Vilenski

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Abstract

A method for high speed bonding of fine wires to electrodes is provided employing a processor controlled wire bonder wherein the bonding tool of the wire bonder is positioned over an electrode on a simiconductor and is accelerated toward the electrode. Shortly before the bonding tool reaches the electrode, the bonding tool is moved toward the electrode at a substantially linear predetermined velocity so that the bonding tool imparts a controlled kinetic energy to the wire as a first bonding force, a second predetermined preload bonding force is applied to the bonding tool at the time of engagement and subsequently a third and final predetermined bonding force is applied to the bonding tool to bond the fine wire to the electrode at high speeds.

Claims3

Dependent claims

A method for high speed bonding fine wire to a semiconductor device comprising the step of:

moving a bonding tool to a position opposite an electrode on a semiconductor device,
accelerating said bonding tool toward said electrode,
terminating said acceleration of said bonding tool before engaging said semiconductor device,
further moving said bonding tool toward said semiconductor device at a substantially linear velocity,
engaging said semiconductor device with said bonding tool at said linear velocity to impart controlled kinetic energy to said fine wire as a first bonding force,
applying a second predetermined preload bonding force to said first bonding force at the time of engagement of said bonding tool with said semiconductor device, and
applying a third and final bonding force to said bonding tool after the termination of said first bonding force.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 06/260,352Filed 4 May 1981 · division
Priority: 22 Nov 1978
Granted: 20 Jul 1982
Term ends: Not estimatedThe source records don’t support an estimate.

Classification10 codes

G05B 19/182
Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to…
G05B 19/293
The positional error is used to control continuously the servomotor according to its magnitude: with speed feedback only
G05B 19/401
Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to…
G05B 2219/43149
Speed, acceleration, deceleration control ADC: rapid approach, then slow, then pressure for clamping, bonding