Chemical vapor deposition of sialon
AssigneeThe United States of America as represented by the United States Department of Energy
InventorsRichard L. Landingham, Alton W. Casey
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Abstract
A laminated composite and a method for forming the composite by chemical vapor deposition. The composite includes a layer of sialon and a material to which the layer is bonded. The method includes the steps of exposing a surface of the material to an ammonia containing atmosphere; heating the surface to at least about 1200.degree. C.; and impinging a gas containing in a flowing atmosphere of air N.sub.2, SiCl.sub.4, and AlCl.sub.3 on the surface.
Claims11
A composite comprising a refractory material coated with a layer of sialon formed by chemical vapor deposition in a flowing atmosphere of air.
A method for coating a surface of a material with a sialon composition in a flowing atmosphere of air to provide a hard, dense, refractory surface, the method comprising:
- a. exposing a surface of a refractory material to an ammonia-containing atmosphere;
- b. heating the surface to at least about 1200.degree. C.;
- c. impinging a gas comprising N.sub.2, SiCl.sub.4, and AlCl.sub.3 on the surface.
Dependencies are inferred from the claim text.