Method of manufacturing target of image pickup tube
AssigneesHitachi, Ltd., Hitachi Denshi Kabushiki Kaisha
InventorsAkira Sasano, Toshio Nakano, Ken Tsutsui, Chushiro Kusano, Tadaaki Hirai, Eiichi Maruyama
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AssigneesHitachi, Ltd., Hitachi Denshi Kabushiki Kaisha
InventorsAkira Sasano, Toshio Nakano, Ken Tsutsui, Chushiro Kusano, Tadaaki Hirai, Eiichi Maruyama
Estimating the term…
A method of manufacturing a target of an image pickup tube comprising the steps of: forming a plurality of groups of transparent conductive signal electrodes on a transparent insulating base plate; forming a first layer on at least a portion constituting an image area of the image pickup tube, said first layer being substantially insoluble in etching liquid used for etching an insulating layer to constitute an intermediate layer insulator in a double layered interconnection structure; forming, after formation of said first layer, an insulating layer to constitute said intermediate-layer insulator; removing a predetermined portion of said insulating layer, removing said first layer together with said insulating layer located thereon; forming bus bars; and forming a photoconductive layer on said plurality of groups of the transparent conductive signal electrodes. This invention provides an excellent method for mass production.
A method of manufacturing a target of an image pickup tube comprising the steps of:
Dependencies are inferred from the claim text.