# US 4,325,084 A · Semiconductor device and method of manufacturing same, as well as a pick-up device and a display device having such a semiconductor device

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 4,325,084 A
- Document ID: US4325084A
- Status: Granted
- Kind: A
- Application number: 06/170,363
- Filed: 1980-07-21
- Granted: 1982-04-13
- Earliest claimed: 1978-01-27
- Assignees: U.S. Philips Corporation
- Inventors: Gerardus G. P. van Gorkom; Arthur M. E. Hoeberechts
- Web page: https://patentgrep.com/patent/US4325084A

## CPC

- H01J 37/3175: {Projection methods, i.e. transfer substantially complete pattern to substrate}
- B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
- B82Y 40/00: Manufacture or treatment of nanostructures
- H01J 1/308: Semiconductor cathodes, e.g. cathodes with PN junction layers
- H01J 2237/31784: Semiconductor cathode
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

The invention relates to a semiconductor cathode based on avalanche breakdown in the p-n junction. The released electrons obtain extra accelerating energy by means of an electrode provided on the device. The achieved efficiency increase makes the manufacture of such cathodes in planar silicon technology sensible. Such cathodes are applied, for example, in cathode ray tube, flat displays, pick-up tubes and electron lithography.

## Claims

### Claim 1

A method of manufacturing a semiconductor device comprising the steps of forming a semiconductor body having a p-n junction with a depletion zone at least locally adjoining a surface of said semiconductor body, providing an electrically insulating layer on said surface, providing an electrically conductive layer on said insulating layer, and forming an aperture through both said conductive layer and said insulating layer to at least a portion of said depletion zone at said surface exposed through said aperture.

### Claim 2 (depends on 1)

A method according to claim 1, wherein ion implantation is carried out through said aperture to increase doping concentration of at least a portion of said surface.

### Claim 3 (depends on 1)

A method according to claim 1, wherein said p-n junction terminates at said surface in said aperture.

### Claim 4 (depends on 1)

A method according to claim 1, wherein a recess is formed by etching said surface through said aperture to a predetermined depth, said p-n junction extending at least partially parallel to a recess surface, and wherein said depletion zone adjoins said recess surface.

### Claim 5 (depends on 4)

A method according to claim 4, wherein said etching is carried out by anisotropic etching.

### Claim 6 (depends on 1)

A method according to claim 1, wherein a recess is formed by etching said surface through said aperture to a predetermined depth, said p-n junction terminating at a wall of a recess surface.

### Claim 7 (depends on 6)

A method according to claim 6, wherein said etching is carried out by anisotropic etching.

### Claim 8

A pick-up device comprising means for generating an electron beam including at least one semiconductor body having a p-n junction, a depletion zone of said p-n junction adjoining at least a surface of said semiconductor body, means for applying a reverse voltage across said p-n junction to generate avalanche multiplication of electrons from said semiconductor body, an electrically insulating layer provided on said surface of said semiconductor body, at least one aperture provided in said insulating layer for exposing at least part of said depletion zone, and electrode means formed on said insulating layer at an edge of said aperture for accelerating electrons through said aperture; means for controlling said electron beam; and means for scanning a charge image with said electron beam.

### Claim 9

A display device comprising means for generating an electron beam including at least one semiconductor body having a p-n junction, a depletion zone of said p-n junction adjoining at least a surface of said semiconductor body, means for applying a reverse voltage across said p-n junction to generate avalanche multiplication of electrons from said semiconductor body, an electrically insulating layer provided on said surface of said semiconductor body, at least one aperture provided in said insulating layer for exposing at least part of said depletion zone, and electrode means formed on said insulating layer at an edge of said aperture for accelerating electrons through said aperture; means for controlling said electron beam; and means for producing an image by said electron beam.

### Claim 10 (depends on 9)

A display device according to claim 9, wherein a fluorescent screen is situated in a vacuum closely adjacent to said semiconductor body, said fluorescent screen being activated by electrons originating at said semiconductor body.