Method for producing silica glass
AssigneeHitachi, Ltd.
InventorsKenzo Susa, Iwao Matsuyama, Shin Satoh, Tsuneo Suganuma
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AssigneeHitachi, Ltd.
InventorsKenzo Susa, Iwao Matsuyama, Shin Satoh, Tsuneo Suganuma
Estimating the term…
A method for producing silica glass wherein a dry silica gel subjected to a water desorption treatment and a carbon removal treatment is heated and has its temperature raised in an atmosphere containing chlorine, to perform a hydroxyl group removal treatment, the resultant silica gel is thereafter heated to a temperature of approximately 1,000.degree. C.-1,100.degree. C. in an atmosphere containing at least 1% of oxygen, to perform a chlorine removal treatment, and the resultant silica gel is further heated to a temperature of 1,050.degree. C.-1,300.degree. C. in He or in vacuum, to perform a sintering treatment. The silica glass thus produced does not form bubbles even when heated to high temperatures of or above 1,300.degree. C. Therefore, it is easily worked and it is free from the lowering of transparency attributed to the bubble formation.
A method for producing silica glass which comprises
A method for producing silica glass which comprises
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