Precision optical distance measurement

A method of measuring distance or displacement comprising the step of directing light from a source toward a surface, with said source producing a cone of illumination, and detecting light from said source reflected from said surface by means of a detector having a light sensitive area within a cone of detection, wherein the output of said detector increases as the illumination incident upon said light sensitive area increases, and wherein said output is used as the measure of said distance or displacement,

• characterized in that the axis of said cone of illumination and the axis of said cone of detection are tilted so that they intersect at an included angle greater than 20 degrees, and further characterized in that the separation between said detector and said surface is less than that which produces maximum output of said detector to the light from said source reflected from said surface, thereby measuring said distance or displacement in the high response region.

A method of measuring distance or displacement parallel to a given measurement axis characterized by directing light from a source producing a cone of illumination onto a first reflective member, with light reflected therefrom onto a second reflective member, and detecting light reflected from said second member with a detector having a light sensitive area within a cone of detection, wherein the output of said detector increases as the illumination incident upon said light sensitive area increases, and wherein said illumination incident upon said area depends upon the positions of said reflective members along said measurement axis relative to the positions of said source and detector along said measurement axis.

An apparatus comprising a light source producing a cone of illumination directed toward a detector having a light sensitive area within a cone of detection, wherein the output of said detector increases as the illumination incident upon said light sensitive area increases, and wherein said source and said detector are capable of motion relative to each other along noncoincident axes that are parallel to a measurement axis, characterized in that the axis of said cone of illumination and the axis of said cone of detection are each tilted by angles greater than 10 degrees with respect to said measurement axis.

An apparatus comprising a light source having a cone of illumination directed toward a surface, and a detector having a light sensitive area within a cone of detection directed toward said surface so as to detect a portion of the light from said source reflected from said surface, wherein the output of said detector increases as the illumination incident upon said light sensitive area increases, and further comprising means for measuring the output of said detector so as to determine the distance or displacement of said surface relative to said source and detector, characterized in that the axis of said cone of illumination and the axis of said cone of detection are tilted so that they intersect at an included angle greater than 20 degrees, and further characterized in that the separation between said detector and said surface is less than that which produces maximum output of said detector to the light from said source reflected from said surface, thereby obtaining increased sensitivity.

An apparatus comprising a light source having a cone of illumination and a detector having a light sensitive area within a cone of detection, wherein the output of said detector increases as the illumination incident upon said light sensitive area increases, characterized in that said apparatus further comprises first and second reflective members capable of motion parallel to a given measurement axis, wherein the first reflective member reflects light from said source onto the second reflective member, which in turn reflects a portion of said light onto said detector, and further characterized in that the axis of the cone of illumination is substantially parallel to the axis of the cone of detection.