Apparatus for measuring volatile hydrides
AssigneeNippon Sanso Corporation
InventorsHikaru Harada, Teruo Akiyama, Tuneo Hiyama
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Abstract
According to the present invention volatile hydrides such as diborane, arsine, phosphine and the like are made to react with mercuric oxide at an ordinary temperature to produce mercury atoms, the concentration of which is thereafter measured and the concentration of volatile hydrides is determined in accordance with the corresponding measured mercury atom concentration. As the measuring apparatus according to the present invention is made to measure mercury atoms, it can easily detect even extremely small quantity of substances such as volatile hydrides and respond quickly, thus enabling the apparatus being suitably used as a monitor in the semiconductor industry.
Claims19
An apparatus for measuring the concentration of volatile hydrides in a gas sample which comprises:
- a reactor containing mercuric oxide wherein the volatile hydrides react stoichiometrically with said mercuric oxide to form mercury atom gas and reacted hydrides,
- means for transferring the gas sample to said reactor,
- means for conducting said mercury atom gas and said reacted hydrides to a detection means,
- said detection means comprising an ultraviolet radiation source, an ultraviolet absorption cell for absorbing ultraviolet radiation, and a light detector for detecting ultraviolet light transmitted through said cell, said transmitted light being directly related to the concentration of said mercury atom gas, and said detection means being operative at room temperature, and
- means for indicating and recording the concentration of said volatile hydrides in the gas sample.
An apparatus for measuring the concentration of volatile hydrides in a gas sample which comprises:
- a reactor containing mercuric oxide wherein the volatile hydrides react stoichiometrically with said mercuric oxide to form vaporous mercury atom and other reacted products,
- means for transferring the gas sample to said reactor,
- means for conducting said vaporous mercury atom to a detection means,
- said detection means comprising an ultraviolet radiation source, an ultraviolet absorption cell for absorbing ultraviolet radiation, and a light detector for detecting ultraviolet light transmitted through said cell, said transmitted light being directly related to the concentration of said vaporous mercury atom, and
- conversion means for indicating, recording and/or alarming in response to a signal from said detection means.
Dependencies are inferred from the claim text.