Method for the precise determination of photoresist exposure time
AssigneeNanometrics Incorporated
InventorVincent J. Coates
Life of this patent
Estimating the term…
Abstract
A method for determining the precise exposure for a photoresist coating by measuring the coating thickness with a microspectrophotometer that provides data for plotting a nearly sinusoidal curve of percent reflectivity versus wavelength. The nominal exposure derived from the thickness measurement is then corrected to a precise value by extrapolation and normalization of the curve at the photosensitive wavelength of the photoresist.
Claims3
A method for determining the precise exposure for a photoresist coating on a substrate material, said method comprising the steps of:
- measuring the precise thickness of the photoresist coating with a thickness computing system that scans said coating in a radiation band in which said coating is substantially insensitive, said computing system providing output data in the form of a plotted curve of percentage reflectivity versus wavelength, said curve having nearly sinusoidal variations in reflectivity as a function of wavelength, the frequency of said variations being a function of refractive index and the precise thickness of said coating, said combination of refractive index and thickness being a measure of the approximate correct exposure for said coating;
- extrapolating said curve to extend into the radiation band containing the optimum photosensitive wavelength of said photoresist coating;
- determining from said extended curve the value of reflectivity at the point said curve intersects said optimum photosensitivity wavelength;
- computing the percentage increase necessary to raise said determined value of reflectivity to the maximum reflectivity of said plotted curve;
- and
- increasing said approximate correct exposure of said coating by said computed percentage increase to obtain the prrecise exposure of said coating.
A method for determining the precise exposure for a photoresist coating on a substrate material, said method comprising the steps of:
- illuminating the photoresist coating with radiation in wavelength band in which said coating is substantially insensitive;
- scanning the radiation reflected from said illuminated coating with a microspectrophotometer having a holographic grating for diffracting a narrow incident ray to the exit aperture of said microspectrophotometer, the arcuate position of said grating representing the wavelength of the diffracted ray passing through said aperture;
- measuring the intensity of radiation passing through said aperture to obtain a value proportional to reflectivity from said coating at the wavelength of said diffracted ray;
- and
- plotting a curve of percentage reflectivity versus wavelength, said curve having sinusoidal variations in reflectivity as a function of wavelength, the frequency of said variations being a function of refractive index and the precise thickness of said photoresist coating, said combination of refractive index and thickness being a measure of the approximate correct exposure of said coating;
- the improvement comprising the additional steps of:
- extrapolating said plotted curve to extend into the radiation band containing the optimum photosensitive wavelength of said photoresist coating;
- determining from said extended curve the value of reflectivity at the point said curve intersects said optimum photosensitivity;
- computing the percentage increase necessary to raise said determined value of reflectivity to the maximum reflectivity of said plotted curve;
- and
- increasing said approximate correct exposure of said coating by said computed percentage increase to obtain the precise exposure of said coating.
Dependencies are inferred from the claim text.