Device for the detection of back-scattered electrons from a sample in an electron microscope
AssigneeErnst Leitz Wetzler GmbH
InventorLudwig Reimer
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Abstract
Disclosed is a device for the detection of back-scattered electrons emitted by a specimen in an electron microscope, comprising a converter for converting back-scattered electrons emitted by the specimen into secondary electrons, which converter includes a surface layer of a crystalline material having a low atomic number and a low electrical conductivity, preferably magnesium oxide; and a detector for detecting secondary electrons emitted by the converter. Also disclosed is an improved electron microscope embodying this detection device.
Claims11
A device for the detection of back-scattered electrons emitted by a specimen in an electron microscope, comprising:
- a converter for converting back-scattered electrons emitted by the specimen into secondary electrons, said converter including a surface layer of a crystalline material having a low atomic number and a low electrical conductivity;
- and
- a detector for detecting secondary electrons emitted by said converter.
Dependencies are inferred from the claim text.