Method of and apparatus for outgassing raw material used to grow crystals
AssigneeRCA Corporation
InventorsNicholas F. Gubitose, Michael J. Zelinka
Life of this patent
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Abstract
A method and apparatus for outgassing raw materials includes the steps of and means for heating the material to a temperature of about 800.degree. C. and maintaining that temperature for a first bake out period during which the material is maintained at a pressure of about 200 millitorr and for a second bake out period during which the material is maintained at a pressure of about 5 millitorr or less. During the first bake out period, an inert gas is backstreamed through the raw material.
Claims12
A method of outgassing raw material comprising the steps of:
- feeding the raw material into a chamber and sealing said chamber;
- heating the raw material to a relatively high temperature over a period of time and evacuating said chamber to a first relatively low pressure during said first period of time;
- feeding an inert gas to said chamber at said first relatively low pressure;
- maintaining said first relatively low pressure and said relatively high temperature for a first bake out period during which contaminants are removed from the raw material;
- and,
- thereafter discontinuing the feeding of an inert gas to said chamber and reducing the pressure therein to a second relatively low pressure less than said first relatively low pressure and maintaining said second relatively low pressure and said relatively high temperature for a second bake out period during which additional contaminants are removed from the raw material.
Apparatus for outgassing raw material comprising a sealed hopper adapted to contain raw material, said hopper being operatively associated with heater means for heating raw material therein to an elevated temperature, first vacuum pump means associated with said hopper for evacuating said hopper to a first relatively low pressure and second vacuum pump means associated with said hopper for evacuating said hopper to a second relatively low pressure than said first relatively low pressure and means for feeding an inert gas to said hopper and through said first vacuum pump means at said first relatively low pressure.
Dependencies are inferred from the claim text.