Laser beam annealing diffuser
AssigneeNational Research Development Corporation
InventorsAnthony G. Cullis, Hugh C. Webber, Paul Bailey
Life of this patent
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Abstract
A laser beam diffuser for use in laser beam annealing comprises a silica laser beam guiding pipe, having a diffusing surface or layer at one end and a polished surface at the other end. The diffusing surface may be a ground surface. A bend or bends removes axial component of speckle produced by the ground surface. Adjacent the polished end the pipe may be of reduced cross section.
Claims6
A laser beam diffuser for use in laser beam annealing comprising a rigid laser beam guiding pipe having a diffusing surface on an input end for diffusing laser radiation directed into the pipe and a polished surface on an output end, and having at least one bend intermediate the input and output ends.
Dependencies are inferred from the claim text.