Mechanical resonator arrangements
AssigneeITT Industries, Inc.
InventorJohn C. Greenwood
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Abstract
Semiconductor transducer devices are provided, some being formed from a single crystal and having a flexible portion which is vibratable. Also a multi-element is disclosed which is a body including mechanical semiconductor resonator. The body has a transverse valley across its width. A comb-like array of flexible silicon cantilevers extend from one end of the body. Each cantilever is adapted to respond to a periodic force such that each has a different vibrational frequency. An alternative embodiment includes an accelerometer having a block with a three cantilever array with a semiconductor filament fixed in tension between each adjacent pair. The middle cantilever is longer than the other two. A further alternative employs elements to support a crystal at two nodal points of vibration.
Claims1
A multi-element semiconductor mechanical resonator comprising:
- a substantially rectangular silicon body formed from a single crystal and having a transverse valley across its width;
- and a comb-like array of flexible silicon cantilevers extending from one end of said body, each said cantilever being adapted to respond to a periodic force such that each has a different vibrational frequency.
Dependencies are inferred from the claim text.