Angular rate sensor with symmetrical diaphragm impulse pump assembly

An angular rate sensor, including:

• a sealed, fluid filled casing for housing a nozzle block assembly having a jet chamber disposed therein, and for housing a jet pump assembly connected for response to an external source of AC signals and supported in registration with said jet chamber by an anvil support means adapted to engage said casing internally, said jet chamber including a nozzle and sensing elements disposed at opposite ends thereof, said sensing elements being cooled differentially in dependence on the angular rotation of the sensor, by a fluid jet formed by fluid force under pressure through said nozzle by an improved pump assembly, comprising
• a diaphragm flexure assembly including a cylindrical flexure element having a mounting end with a major diameter aperature adapted to engage said anvil support means and having another end thereof closed to a minor diameter aperture by an end wall to form a pump chamber therein, said diaphragm flexure assembly further including a pair of piezoelectric material wafers coated on each side with an electrically conductive film and metallurgically bonded face to face on either side of said end wall to form a pump diaphragm, said wafers having like positioned minor diameter apertures in registration with said minor diameter aperture in said end wall to form a pump orifice in fluid communication with said nozzle, said wafers connected at the other side of each for response to the external source of AC signals for providing oscillatory displacement of said diaphragm to force fluid from said chamber through said orifice to said nozzle.