Pressure sensitive apparatus

A pressure sensitive apparatus for providing an output in response to a pressure, comprising:

• a semiconductor diaphragm assembly on which a pressure sensitive diaphragm is formed, strain sensitive elements being formed on said pressure sensitive diaphragm and providing an output depending on the pressure applied thereto;
• first supporting means being made of borosilicate glass and having an upper surface on which said semiconductor diaphragm assembly is rigidly and hermetically bonded;
• second supporting means being made of an iron-nickel alloy with a nickel content lying within a range of from 35% to 43% and having an upper surface on which said first supporting means integrated with said semiconductor diaphragm assembly is rigidly and hermetically bonded;
• and
• housing means, within which said integrated semiconductor diaphragm assembly, said first supporting means and said second supporting means are positioned, and said second supporting means being rigidly fixed to a base of said housing means at the lower end portion thereof, said semiconductor diaphragm assembly being directly bonded to the borosilicate glass of said first supporting means and the iron-nickel alloy of said second supporting means being directly bonded to the borosilicate glass of said first supporting means by anodic bonding.