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US 4,303,864 AGranted
Sextupole system for the correction of spherical aberration
AssigneeThe United States of America as represented by the United States Department of Energy
InventorsAlbert V. Crewe, David A. Kopf
Life of this patent
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Abstract
A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses.
Claims4
In an electron beam device having a source of electrons, the improvement in the device for correcting spherical aberration, comprising:
- a first lens for focusing the beam to a point, a sextupole for focusing a beam in an image plane having a third order, spherical aberration, the point being at the center of said sextupole, and a second lens positioned at the image plane of said sextupole for focusing the beam to a point in an image plane.
Dependencies are inferred from the claim text.