Method and apparatus for producing a variable intensity pattern of sputtering material on a substrate
AssigneeVac-Tec Systems, Inc.
InventorCharles F. Morrison, Jr.
Life of this patent
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Abstract
Method and apparatus for producing a variable intensity pattern of sputtering material on a substrate by providing a mask having a patterned opening therein between the cathode of a sputtering device and the substrate to be coated, the mask being so positioned as (a) to not affect the plasma over the cathode surface and (b) to be out of contact with the substrate surface, there being relative movement between at least the cathode and the substrate. The substrate may be either flat, curved or tubular, for example, there also being described apparatus and a method of making a broad band, dipole antenna.
Claims28
A method of producing a dipole antenna having two variable electrical conductivity elements, said method comprising the steps of
- activating a sputtering device having a cathode including electrical conductivity material to be sputtered on at least one substrate, a plasma being established adjacent said cathode whereby said electrical conductivity material is sputtered toward said substrate;
- providing at least one mask having at least one patterned opening of fixed configuration therein between said cathode and said substrate so that (a) it is out of contact with the substrate and (b) it is no closer than about 3/4 inch from the cathode;
- providing a further mask in intimate contact with a portion of said substrate, said portion dividing the substrate into first and second areas where the two dipole elements are to be respectively deposited;
- relatively moving at least said cathode and said substrate with respect to each other so that the electrical conductivity material passing through said patterned opening in the mask deposits on the substrate, the thickness of the deposited material varying across at least one dimension of said first and second areas of the substrate to thereby form said variable electrical conductivity elements of the antenna due to the fixed configuration of the patterned opening;
- and
- depositing electrically conductive connector bands at opposite sides of said further mask.
Dependencies are inferred from the claim text.