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US 4,302,531 AGranted
Method of manufacture of photodiode
AssigneeThe United States of America as represented by the Secretary of the Army
InventorsJohn T. Cox, Michael B. Garber, Marilyn A. Jasper, Randolph E. Longshore
Life of this patent
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Abstract
A process is described in which planar photodiodes are formed by diffusing lead into p-type Pb.sub.0.8 Sn.sub.0.2 Te single crystal material.
Claims7
The method of forming one or more photodiodes comprising the steps of:
- placing a clean chip of lead-tin-telluride in a vacuum chamber;
- reducing the pressure in said chamber to approximately 10.sup.-6 torr;
- prebaking the chip;
- depositing a thin layer of lead on at least one selected portion of said chip;
- depositing a nonconducting evaporation inhibiting layer of SiO over said lead layer which is compatible with processing temperatures of at least 400.degree. C.;
- diffusing said layer of lead into said chip at a temperature of approximately 400.degree. C. for approximately 20 minutes;
- removing said chip from said vacuum chamber;
- coating said chip with a dielectric layer of insulating material;
- removing only that part of said non-conducting layer of SiO and said dielectric layer of insulating material which cover a surface area within each said selected portion to expose a portion of said surface area;
- returning said chip to said chamber;
- reducing the chamber pressure again to 10.sup.-6 torr;
- and
- depositing a lead-out structure of individual indium contacts over and through said nonconducting layer with a separate contact connected to said exposed area of each selected portion of said chip.
10 more elements
Dependencies are inferred from the claim text.