XeCl Avalanche discharge laser employing Ar as a diluent
AssigneeThe United States of America as represented by the United States Department of Energy
InventorRobert C. Sze
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Abstract
A XeCl avalanche discharge exciplex laser which uses a gaseous lasing starting mixture of: (0.2%-0.4% chlorine donor/2.5%-10% Xe/97.3%-89.6% Ar). The chlorine donor normally comprises HCl but can also comprise CCl.sub.4 BCl.sub.3. Use of Ar as a diluent gas reduces operating pressures over other rare gas halide lasers to near atmospheric pressure, increases output lasing power of the XeCl avalanche discharge laser by 30% to exceed KrF avalanche discharge lasing outputs, and is less expensive to operate.
Claims4
In a XeCl avalanche discharge exciplex laser, a gaseous lasing starting mixture comprising:
- essentially Xe gas;
- a chlorine donor;
- Ar comprising the primary portion of diluent gas.
In a XeCl avalanche discharge exciplex laser, a gaseous lasing starting mixture comprising:
- 0.2%-0.4% chlorine donor;
- 2.5%-10% Xe;
- 97.3-89.6% Ar diluent.
Dependencies are inferred from the claim text.